Microelectronic manufacturing of a microsensor based on polyaniline for ammonia gas sensing

Alina Visinoiu, Maihaela Ghita, Gheorghe Marin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

The fabrication and operation of an ammonia chemoresistor is described. The sensor responds to changes in the resistance (impedance) of a thin layer of conductive polymer is due to changes in ammonia concentration. The polyaniline film was deposited by electroless plating (dipping) method on interdigitated array made by photolithographic technique. The PANI film was characterized by UV/VIS and IR Spectroscopy and respectively, Atomic Force Microscopy. Impedance Spectroscopy was used for sensor characterization
Original languageEnglish
Title of host publicationIEEE, 22nd International Conference on Microelectronics, 2000
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages619
Volume2
ISBN (Print)0-7803-5235-1
DOIs
Publication statusPublished - May 2000

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