Microelectronic manufacturing of a microsensor based on polyaniline for ammonia gas sensing

Alina Visinoiu; Maihaela Ghita; Gheorghe Marin

doi:10.1109/ICMEL.2000.838767

Microelectronic manufacturing of a microsensor based on polyaniline for ammonia gas sensing

Alina Visinoiu, Maihaela Ghita, Gheorghe Marin

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

The fabrication and operation of an ammonia chemoresistor is described. The sensor responds to changes in the resistance (impedance) of a thin layer of conductive polymer is due to changes in ammonia concentration. The polyaniline film was deposited by electroless plating (dipping) method on interdigitated array made by photolithographic technique. The PANI film was characterized by UV/VIS and IR Spectroscopy and respectively, Atomic Force Microscopy. Impedance Spectroscopy was used for sensor characterization

Original language	English
Title of host publication	IEEE, 22nd International Conference on Microelectronics, 2000
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	619
Volume	2
ISBN (Print)	0-7803-5235-1
DOIs	https://doi.org/10.1109/ICMEL.2000.838767
Publication status	Published - May 2000

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10.1109/ICMEL.2000.838767

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title = "Microelectronic manufacturing of a microsensor based on polyaniline for ammonia gas sensing",

abstract = "The fabrication and operation of an ammonia chemoresistor is described. The sensor responds to changes in the resistance (impedance) of a thin layer of conductive polymer is due to changes in ammonia concentration. The polyaniline film was deposited by electroless plating (dipping) method on interdigitated array made by photolithographic technique. The PANI film was characterized by UV/VIS and IR Spectroscopy and respectively, Atomic Force Microscopy. Impedance Spectroscopy was used for sensor characterization",

author = "Alina Visinoiu and Maihaela Ghita and Gheorghe Marin",

year = "2000",

month = may,

doi = "10.1109/ICMEL.2000.838767",

language = "English",

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booktitle = "IEEE, 22nd International Conference on Microelectronics, 2000",

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Microelectronic manufacturing of a microsensor based on polyaniline for ammonia gas sensing. / Visinoiu, Alina; Ghita, Maihaela; Marin, Gheorghe.
IEEE, 22nd International Conference on Microelectronics, 2000. Vol. 2 Institute of Electrical and Electronics Engineers Inc., 2000. p. 619.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Microelectronic manufacturing of a microsensor based on polyaniline for ammonia gas sensing

AU - Visinoiu, Alina

AU - Ghita, Maihaela

AU - Marin, Gheorghe

PY - 2000/5

Y1 - 2000/5

N2 - The fabrication and operation of an ammonia chemoresistor is described. The sensor responds to changes in the resistance (impedance) of a thin layer of conductive polymer is due to changes in ammonia concentration. The polyaniline film was deposited by electroless plating (dipping) method on interdigitated array made by photolithographic technique. The PANI film was characterized by UV/VIS and IR Spectroscopy and respectively, Atomic Force Microscopy. Impedance Spectroscopy was used for sensor characterization

AB - The fabrication and operation of an ammonia chemoresistor is described. The sensor responds to changes in the resistance (impedance) of a thin layer of conductive polymer is due to changes in ammonia concentration. The polyaniline film was deposited by electroless plating (dipping) method on interdigitated array made by photolithographic technique. The PANI film was characterized by UV/VIS and IR Spectroscopy and respectively, Atomic Force Microscopy. Impedance Spectroscopy was used for sensor characterization

U2 - 10.1109/ICMEL.2000.838767

DO - 10.1109/ICMEL.2000.838767

M3 - Conference contribution

SN - 0-7803-5235-1

VL - 2

SP - 619

BT - IEEE, 22nd International Conference on Microelectronics, 2000

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

Microelectronic manufacturing of a microsensor based on polyaniline for ammonia gas sensing

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