Microfabrication of silicon hydrogenated thin targets for multi-MeV laser-driven proton acceleration

Antonino Picciotto; Daniele Margarone; Michele Crivellari; Pierluigi Bellutti; Sabrina Colpo; Lorenzo Torrisi; Josef Krasa; Andriy Velhyan; Jiri Ullschmied

doi:10.1143/APEX.4.126401

Microfabrication of silicon hydrogenated thin targets for multi-MeV laser-driven proton acceleration

Antonino Picciotto^*, Daniele Margarone, Michele Crivellari, Pierluigi Bellutti, Sabrina Colpo, Lorenzo Torrisi, Josef Krasa, Andriy Velhyan, Jiri Ullschmied

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

An ad hoc microfabrication technique was employed for the optimization of thin hydrogenated silicon membranes for the first experimental application in the field of laser-driven proton acceleration. The tetra methyl ammonium hydroxide wet etching and further microfabrication processes allowed the optimization of the target structure and geometry. Samples were doped in a H ₂ environment during an annealing process at 420 °C in order to increase the hydrogen concentration in the silicon matrix. This solution enabled the production of high-current (about 100 mA at 1 m from the source) and multi-MeV proton beams.

Original language	English
Article number	126401
Journal	Applied Physics Express
Volume	4
Issue number	12
DOIs	https://doi.org/10.1143/APEX.4.126401
Publication status	Published - Dec 2011
Externally published	Yes

Bibliographical note

Copyright:
Copyright 2012 Elsevier B.V., All rights reserved.

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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title = "Microfabrication of silicon hydrogenated thin targets for multi-MeV laser-driven proton acceleration",

abstract = "An ad hoc microfabrication technique was employed for the optimization of thin hydrogenated silicon membranes for the first experimental application in the field of laser-driven proton acceleration. The tetra methyl ammonium hydroxide wet etching and further microfabrication processes allowed the optimization of the target structure and geometry. Samples were doped in a H 2 environment during an annealing process at 420 °C in order to increase the hydrogen concentration in the silicon matrix. This solution enabled the production of high-current (about 100 mA at 1 m from the source) and multi-MeV proton beams.",

author = "Antonino Picciotto and Daniele Margarone and Michele Crivellari and Pierluigi Bellutti and Sabrina Colpo and Lorenzo Torrisi and Josef Krasa and Andriy Velhyan and Jiri Ullschmied",

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language = "English",

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journal = "Applied Physics Express",

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Microfabrication of silicon hydrogenated thin targets for multi-MeV laser-driven proton acceleration. / Picciotto, Antonino; Margarone, Daniele; Crivellari, Michele; Bellutti, Pierluigi; Colpo, Sabrina; Torrisi, Lorenzo; Krasa, Josef; Velhyan, Andriy; Ullschmied, Jiri.

In: Applied Physics Express, Vol. 4, No. 12, 126401, 12.2011.

Research output: Contribution to journal › Article › peer-review

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AU - Picciotto, Antonino

AU - Margarone, Daniele

AU - Crivellari, Michele

AU - Bellutti, Pierluigi

AU - Colpo, Sabrina

AU - Torrisi, Lorenzo

AU - Krasa, Josef

AU - Velhyan, Andriy

AU - Ullschmied, Jiri

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