Microfabrication of silicon hydrogenated thin targets for multi-MeV laser-driven proton acceleration

Antonino Picciotto*, Daniele Margarone, Michele Crivellari, Pierluigi Bellutti, Sabrina Colpo, Lorenzo Torrisi, Josef Krasa, Andriy Velhyan, Jiri Ullschmied

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)


An ad hoc microfabrication technique was employed for the optimization of thin hydrogenated silicon membranes for the first experimental application in the field of laser-driven proton acceleration. The tetra methyl ammonium hydroxide wet etching and further microfabrication processes allowed the optimization of the target structure and geometry. Samples were doped in a H 2 environment during an annealing process at 420 °C in order to increase the hydrogen concentration in the silicon matrix. This solution enabled the production of high-current (about 100 mA at 1 m from the source) and multi-MeV proton beams.

Original languageEnglish
Article number126401
JournalApplied Physics Express
Issue number12
Publication statusPublished - Dec 2011
Externally publishedYes

Bibliographical note

Copyright 2012 Elsevier B.V., All rights reserved.

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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