Abstract
An ad hoc microfabrication technique was employed for the optimization of thin hydrogenated silicon membranes for the first experimental application in the field of laser-driven proton acceleration. The tetra methyl ammonium hydroxide wet etching and further microfabrication processes allowed the optimization of the target structure and geometry. Samples were doped in a H 2 environment during an annealing process at 420 °C in order to increase the hydrogen concentration in the silicon matrix. This solution enabled the production of high-current (about 100 mA at 1 m from the source) and multi-MeV proton beams.
Original language | English |
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Article number | 126401 |
Journal | Applied Physics Express |
Volume | 4 |
Issue number | 12 |
DOIs | |
Publication status | Published - Dec 2011 |
Externally published | Yes |
Bibliographical note
Copyright:Copyright 2012 Elsevier B.V., All rights reserved.
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)