Molecular Dynamics simulations of growth and low-energy ion polishing of thin molybdenum films for EUV multilayer mirrors

Peter Klaver, W.J. Goedheer, B.J. Thijsse, F. Bijkerk

Research output: Contribution to conferencePaper

Original languageEnglish
Pages305
Number of pages1
Publication statusPublished - 2000
EventMaterials Research Society Fall meeting - Boston, United States
Duration: 01 Jan 200001 Jan 2000

Conference

ConferenceMaterials Research Society Fall meeting
CountryUnited States
CityBoston
Period01/01/200001/01/2000

Cite this