Molecular Dynamics simulations of growth and low-energy ion polishing of thin molybdenum films for EUV multilayer mirrors

Peter Klaver, W.J. Goedheer, B.J. Thijsse, F. Bijkerk

Research output: Contribution to conference › Paper

Original language	English
Pages	305
Number of pages	1
Publication status	Published - 2000
Event	Materials Research Society Fall meeting - Boston, United States Duration: 01 Jan 2000 → 01 Jan 2000

Conference	Materials Research Society Fall meeting
Country/Territory	United States
City	Boston
Period	01/01/2000 → 01/01/2000

Cite this

@conference{6e25d5cd322149d3a42f1de8a918d020,

title = "Molecular Dynamics simulations of growth and low-energy ion polishing of thin molybdenum films for EUV multilayer mirrors",

author = "Peter Klaver and W.J. Goedheer and B.J. Thijsse and F. Bijkerk",

year = "2000",

language = "English",

pages = "305",

note = "Materials Research Society Fall meeting ; Conference date: 01-01-2000 Through 01-01-2000",

}

TY - CONF

T1 - Molecular Dynamics simulations of growth and low-energy ion polishing of thin molybdenum films for EUV multilayer mirrors

AU - Klaver, Peter

AU - Goedheer, W.J.

AU - Thijsse, B.J.

AU - Bijkerk, F.

PY - 2000

Y1 - 2000

UR - http://www.scopus.com/inward/record.url?scp=0034500190&partnerID=8YFLogxK

M3 - Paper

SP - 305

T2 - Materials Research Society Fall meeting

Y2 - 1 January 2000 through 1 January 2000

ER -