Monolithic multiwavelength VCSEL array using cavity patterning

Antoine Pissis, Stefano Tirelli, Lorenzo Bosco, Viktoriia Gorbenko, Martin Suess, Urs Siegenthaler, David Quandt, Donato Bonfrate, Pratyush Das Kanungo, Evgeny Zibik

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)
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We report on a novel approach to adjust the emission wavelength of VCSEL devices. By patterning the Fabry-Perot cavity, we can control the effective refractive index of the optical mode and thus adjust the resonant wavelength. We developed a fabrication process based on 2 steps epitaxy and a lithographic cavity patterning to define the emission wavelength at the emitter level. A multiwavelength VCSEL array with a 30 nm wavelength tuning range around 940 nm is demonstrated.
Original languageEnglish
Pages (from-to)961 - 964
JournalIEEE Photonics Technology Letters
Issue number18
Early online date02 Aug 2022
Publication statusPublished - 15 Sept 2022
Externally publishedYes


  • wavelength division multiplexing
  • wavelength control
  • overgrowth


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