Near-field optical mapping of the ion-implanted patterns fabricated in amorphous silicon carbide

Tanya Tsvetkova; Satoshi Takahashi; Anatoly Zayats; Paul Dawson; R. Turner; L. Bischoff; O. Angelov; D. Dimova-Malinovska

doi:10.1016/j.vacuum.2005.02.002

Near-field optical mapping of the ion-implanted patterns fabricated in amorphous silicon carbide

Tanya Tsvetkova
, Satoshi Takahashi
, Anatoly Zayats
, Paul Dawson
, R. Turner
, L. Bischoff
, O. Angelov
, D. Dimova-Malinovska

Research output: Contribution to conference › Paper

Original language	English
Pages	94-99
Number of pages	6
DOIs	https://doi.org/10.1016/j.vacuum.2005.02.002
Publication status	Published - Jun 2005
Event	5th International Conference on Ion Implantation and Other Applications of Ions and Electrons (ION2004) - Kazimierz Dolny, Poland Duration: 01 Jun 2005 → 01 Jun 2005

Conference

Conference	5th International Conference on Ion Implantation and Other Applications of Ions and Electrons (ION2004)
Country/Territory	Poland
City	Kazimierz Dolny
Period	01/06/2005 → 01/06/2005

Access to Document

10.1016/j.vacuum.2005.02.002

Cite this

Tsvetkova, T., Takahashi, S., Zayats, A., Dawson, P., Turner, R., Bischoff, L., Angelov, O., & Dimova-Malinovska, D. (2005). Near-field optical mapping of the ion-implanted patterns fabricated in amorphous silicon carbide. 94-99. Paper presented at 5th International Conference on Ion Implantation and Other Applications of Ions and Electrons (ION2004), Kazimierz Dolny, Poland. https://doi.org/10.1016/j.vacuum.2005.02.002

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title = "Near-field optical mapping of the ion-implanted patterns fabricated in amorphous silicon carbide",

author = "Tanya Tsvetkova and Satoshi Takahashi and Anatoly Zayats and Paul Dawson and R. Turner and L. Bischoff and O. Angelov and D. Dimova-Malinovska",

year = "2005",

month = jun,

doi = "10.1016/j.vacuum.2005.02.002",

language = "English",

pages = "94--99",

note = "5th International Conference on Ion Implantation and Other Applications of Ions and Electrons (ION2004) ; Conference date: 01-06-2005 Through 01-06-2005",

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Tsvetkova, T, Takahashi, S, Zayats, A, Dawson, P, Turner, R, Bischoff, L, Angelov, O & Dimova-Malinovska, D 2005, 'Near-field optical mapping of the ion-implanted patterns fabricated in amorphous silicon carbide', Paper presented at 5th International Conference on Ion Implantation and Other Applications of Ions and Electrons (ION2004), Kazimierz Dolny, Poland, 01/06/2005 - 01/06/2005 pp. 94-99. https://doi.org/10.1016/j.vacuum.2005.02.002

Near-field optical mapping of the ion-implanted patterns fabricated in amorphous silicon carbide. / Tsvetkova, Tanya; Takahashi, Satoshi; Zayats, Anatoly et al.
2005. 94-99 Paper presented at 5th International Conference on Ion Implantation and Other Applications of Ions and Electrons (ION2004), Kazimierz Dolny, Poland.

Research output: Contribution to conference › Paper

TY - CONF

T1 - Near-field optical mapping of the ion-implanted patterns fabricated in amorphous silicon carbide

AU - Tsvetkova, Tanya

AU - Takahashi, Satoshi

AU - Zayats, Anatoly

AU - Dawson, Paul

AU - Turner, R.

AU - Bischoff, L.

AU - Angelov, O.

AU - Dimova-Malinovska, D.

PY - 2005/6

Y1 - 2005/6

U2 - 10.1016/j.vacuum.2005.02.002

DO - 10.1016/j.vacuum.2005.02.002

M3 - Paper

SP - 94

EP - 99

T2 - 5th International Conference on Ion Implantation and Other Applications of Ions and Electrons (ION2004)

Y2 - 1 June 2005 through 1 June 2005

ER -