Novel materials for the semiconductor industry, deposited using a rapid thermal chemical vapour deposition system

John Montgomery, Fred Ruddell, David McNeill, Mervyn Armstrong, Harold Gamble

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)481-492
Number of pages12
JournalJournal of Materials Processing Technology
Volume33(4)
Publication statusPublished - Sep 1992

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