Observation of fast hydrogen atoms formed by ion bombarding of surfaces

Timo Gans, V. Schulz-von Der Gathen, U. Czarnetzki, H.F. Döbele

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)

Abstract

We report on the observation of fast hydrogen atoms in a capacitively coupled RF reactor by optical emission spectroscopy. For the analysis we use the prominent H-alpha emission line of atomic hydrogen in combination with other lines from molecular hydrogen and argon. Several chaxacteristic emission structures can be identified. One of these structures is related to fast hydrogen atoms traveling from the surface of the powered electrode to the plasma bulk. From the appearance time within the RF period we conclude that this feature originates from ion bombardment of the electrode surface. Measured pressure dependencies and a simple model for the ion dynamics support this assumption.
Original languageEnglish
Pages (from-to)596-602
Number of pages7
JournalContributions to Plasma Physics
Volume42 (6-7)
Issue number6-7
Publication statusPublished - 2002

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Condensed Matter Physics

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