On Optimising Spatial Sampling Plans for Wafer Profile Reconstruction

Sean McLoone, Federico Zocco, Marco Maggipinto, Gian Antonio Susto

Research output: Contribution to conferencePaper

1 Citation (Scopus)
Original languageEnglish
Number of pages6
Publication statusPublished - 2018
Event3rd IFAC Conference on Embedded Systems, Computational Intelligence and Telematics in Control - Faro, Portugal
Duration: 06 Jun 201808 Jun 2018
Conference number: 3

Conference

Conference3rd IFAC Conference on Embedded Systems, Computational Intelligence and Telematics in Control
Abbreviated titleCESCIT 2018
CountryPortugal
CityFaro
Period06/06/201808/06/2018

Cite this

McLoone, S., Zocco, F., Maggipinto, M., & Susto, G. A. (2018). On Optimising Spatial Sampling Plans for Wafer Profile Reconstruction. Paper presented at 3rd IFAC Conference on Embedded Systems, Computational Intelligence and Telematics in Control, Faro, Portugal.