On Optimising Spatial Sampling Plans for Wafer Profile Reconstruction

Sean McLoone; Federico Zocco; Marco Maggipinto; Gian Antonio Susto

On Optimising Spatial Sampling Plans for Wafer Profile Reconstruction

Sean McLoone, Federico Zocco, Marco Maggipinto, Gian Antonio Susto

Research output: Contribution to conference › Paper › peer-review

Original language	English
Number of pages	6
Publication status	Published - 2018
Event	3rd IFAC Conference on Embedded Systems, Computational Intelligence and Telematics in Control - Faro, Portugal Duration: 06 Jun 2018 → 08 Jun 2018 Conference number: 3

Conference

Conference	3rd IFAC Conference on Embedded Systems, Computational Intelligence and Telematics in Control
Abbreviated title	CESCIT 2018
Country/Territory	Portugal
City	Faro
Period	06/06/2018 → 08/06/2018

Cite this

@conference{b9f81007a1e44538a316b28509ef6ed3,

title = "On Optimising Spatial Sampling Plans for Wafer Profile Reconstruction",

author = "Sean McLoone and Federico Zocco and Marco Maggipinto and Susto, {Gian Antonio}",

year = "2018",

language = "English",

note = "3rd IFAC Conference on Embedded Systems, Computational Intelligence and Telematics in Control, CESCIT 2018 ; Conference date: 06-06-2018 Through 08-06-2018",

}

TY - CONF

T1 - On Optimising Spatial Sampling Plans for Wafer Profile Reconstruction

AU - McLoone, Sean

AU - Zocco, Federico

AU - Maggipinto, Marco

AU - Susto, Gian Antonio

N1 - Conference code: 3

PY - 2018

Y1 - 2018

M3 - Paper

T2 - 3rd IFAC Conference on Embedded Systems, Computational Intelligence and Telematics in Control

Y2 - 6 June 2018 through 8 June 2018

ER -