Original language | English |
---|---|
Pages | 16-20 |
Number of pages | 5 |
Publication status | Published - Apr 2008 |
Event | Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - Nice, France Duration: 01 Apr 2008 → 01 Apr 2008 |
Conference
Conference | Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS |
---|---|
Country/Territory | France |
City | Nice |
Period | 01/04/2008 → 01/04/2008 |