Optimisation of tungsten disilicide dopant diffusion conduits for SSOI applications

S. Liao, Michael Bain, Paul Baine, David McNeill, Mervyn Armstrong, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Pages83-84
Number of pages2
Publication statusPublished - Jan 2009
EventProceedings of EuroSOI 2009 - Goteborg, Sweden
Duration: 01 Jan 200901 Jan 2009

Conference

ConferenceProceedings of EuroSOI 2009
CountrySweden
CityGoteborg
Period01/01/200901/01/2009

Cite this

Liao, S., Bain, M., Baine, P., McNeill, D., Armstrong, M., & Gamble, H. (2009). Optimisation of tungsten disilicide dopant diffusion conduits for SSOI applications. 83-84. Paper presented at Proceedings of EuroSOI 2009, Goteborg, Sweden.