Optimisation of tungsten disilicide dopant diffusion conduits for SSOI applications

S. Liao, Michael Bain, Paul Baine, David McNeill, Mervyn Armstrong, Harold Gamble

Research output: Contribution to conference › Paper

Original language	English
Pages	83-84
Number of pages	2
Publication status	Published - Jan 2009
Event	Proceedings of EuroSOI 2009 - Goteborg, Sweden Duration: 01 Jan 2009 → 01 Jan 2009

Cite this

@conference{40e07c2a88a847f097bd1a43282460ee,

title = "Optimisation of tungsten disilicide dopant diffusion conduits for SSOI applications",

author = "S. Liao and Michael Bain and Paul Baine and David McNeill and Mervyn Armstrong and Harold Gamble",

year = "2009",

month = jan,

language = "English",

pages = "83--84",

note = "Proceedings of EuroSOI 2009 ; Conference date: 01-01-2009 Through 01-01-2009",

}