Optimization of conductivity monitoring in micromachined silicon capillaries

Paul Rainey, Neil Mitchell, Harold Gamble

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	159-165
Number of pages	7
Journal	SPIE Journal of Microlithography, Microfabrication, and Microsystems
Volume	1(2)
Issue number	2
DOIs	https://doi.org/10.1117/1.1479708
Publication status	Published - Jul 2002

ASJC Scopus subject areas

@article{d2259a5d3a704ff68eb68d30c55d9e18,

title = "Optimization of conductivity monitoring in micromachined silicon capillaries",

author = "Paul Rainey and Neil Mitchell and Harold Gamble",

year = "2002",

month = jul,

doi = "10.1117/1.1479708",

language = "English",

volume = "1(2)",

pages = "159--165",

journal = "SPIE Journal of Microlithography, Microfabrication, and Microsystems",

issn = "1537-1646",

publisher = "SPIE - The International Society for Optical Engineering",

number = "2",

}

TY - JOUR

T1 - Optimization of conductivity monitoring in micromachined silicon capillaries

AU - Rainey, Paul

AU - Mitchell, Neil

AU - Gamble, Harold

PY - 2002/7

Y1 - 2002/7

UR - http://www.scopus.com/inward/record.url?scp=70449890995&partnerID=8YFLogxK

U2 - 10.1117/1.1479708

DO - 10.1117/1.1479708

M3 - Article

SN - 1537-1646

VL - 1(2)

SP - 159

EP - 165

JO - SPIE Journal of Microlithography, Microfabrication, and Microsystems

JF - SPIE Journal of Microlithography, Microfabrication, and Microsystems

IS - 2

ER -