Optimization of conductivity monitoring in micromachined silicon capillaries

Paul Rainey, Neil Mitchell, Harold Gamble

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)159-165
Number of pages7
JournalSPIE Journal of Microlithography, Microfabrication, and Microsystems
Volume1(2)
Issue number2
DOIs
Publication statusPublished - Jul 2002

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Atomic and Molecular Physics, and Optics

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