Optimization of the uniaxial nature of strain on cantilever for MOSFET sensors

Research output: Contribution to conferencePoster

Original languageEnglish
Publication statusPublished - 09 Sep 2012
Event23rd Micromechanics and Microsystems Europe - Ilmenau, Germany
Duration: 09 Sep 2012 → …

Conference

Conference23rd Micromechanics and Microsystems Europe
CountryGermany
CityIlmenau
Period09/09/2012 → …

Cite this