| Original language | English |
|---|---|
| Publication status | Published - 09 Sept 2012 |
| Event | 23rd Micromechanics and Microsystems Europe - Ilmenau, Germany Duration: 09 Sept 2012 → … |
Conference
| Conference | 23rd Micromechanics and Microsystems Europe |
|---|---|
| Country/Territory | Germany |
| City | Ilmenau |
| Period | 09/09/2012 → … |