Phase and space resolved optical emission spectroscopic investigations of an inductively coupled RF plasma using an imaging acousto-optic spectrometer

T. Kampschulte, J. Schulze, Timo Gans, U. Czarnetzki, S. Marke, T. Wallendorf

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

A novel acousto-optic spectrometer (IfU Diagnostic Systems GmbH) for 2-dimensional (2D) optical emission spectroscopy with high spectral resolution has been developed. The spectrometer is based on acousto-optic tuneable filter technology with fast random wavelength access. Measurements for characterisation of the imaging quality, the spatial resolution, and the spectral resolution are presented. The applicability for 2D-space and phase resolved optical emission spectroscopy (2D-PROES) is shown. 2D-PROES has been applied to an inductively coupled plasma with radio frequency excitation at 13.56 MHz.
Original languageEnglish
Pages (from-to)859-861
Number of pages3
JournalSurface and Coatings Technology
Volume200 (1-4)
Issue number1-4 SPEC. ISS.
DOIs
Publication statusPublished - 01 Oct 2005

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Fingerprint Dive into the research topics of 'Phase and space resolved optical emission spectroscopic investigations of an inductively coupled RF plasma using an imaging acousto-optic spectrometer'. Together they form a unique fingerprint.

Cite this