Phase and space resolved optical emission spectroscopic investigations of an inductively coupled RF plasma using an imaging acousto-optic spectrometer

T. Kampschulte; J. Schulze; Timo Gans; U. Czarnetzki; S. Marke; T. Wallendorf

doi:10.1016/j.surfcoat.2005.02.138

Phase and space resolved optical emission spectroscopic investigations of an inductively coupled RF plasma using an imaging acousto-optic spectrometer

T. Kampschulte, J. Schulze, Timo Gans, U. Czarnetzki, S. Marke, T. Wallendorf

School of Mathematics and Physics

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

A novel acousto-optic spectrometer (IfU Diagnostic Systems GmbH) for 2-dimensional (2D) optical emission spectroscopy with high spectral resolution has been developed. The spectrometer is based on acousto-optic tuneable filter technology with fast random wavelength access. Measurements for characterisation of the imaging quality, the spatial resolution, and the spectral resolution are presented. The applicability for 2D-space and phase resolved optical emission spectroscopy (2D-PROES) is shown. 2D-PROES has been applied to an inductively coupled plasma with radio frequency excitation at 13.56 MHz.

Original language	English
Pages (from-to)	859-861
Number of pages	3
Journal	Surface and Coatings Technology
Volume	200 (1-4)
Issue number	1-4 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.surfcoat.2005.02.138
Publication status	Published - 01 Oct 2005

ASJC Scopus subject areas

Surfaces, Coatings and Films
Condensed Matter Physics
Surfaces and Interfaces

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10.1016/j.surfcoat.2005.02.138

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title = "Phase and space resolved optical emission spectroscopic investigations of an inductively coupled RF plasma using an imaging acousto-optic spectrometer",

abstract = "A novel acousto-optic spectrometer (IfU Diagnostic Systems GmbH) for 2-dimensional (2D) optical emission spectroscopy with high spectral resolution has been developed. The spectrometer is based on acousto-optic tuneable filter technology with fast random wavelength access. Measurements for characterisation of the imaging quality, the spatial resolution, and the spectral resolution are presented. The applicability for 2D-space and phase resolved optical emission spectroscopy (2D-PROES) is shown. 2D-PROES has been applied to an inductively coupled plasma with radio frequency excitation at 13.56 MHz.",

author = "T. Kampschulte and J. Schulze and Timo Gans and U. Czarnetzki and S. Marke and T. Wallendorf",

year = "2005",

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doi = "10.1016/j.surfcoat.2005.02.138",

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T1 - Phase and space resolved optical emission spectroscopic investigations of an inductively coupled RF plasma using an imaging acousto-optic spectrometer

AU - Kampschulte, T.

AU - Schulze, J.

AU - Gans, Timo

AU - Czarnetzki, U.

AU - Marke, S.

AU - Wallendorf, T.

PY - 2005/10/1

Y1 - 2005/10/1

N2 - A novel acousto-optic spectrometer (IfU Diagnostic Systems GmbH) for 2-dimensional (2D) optical emission spectroscopy with high spectral resolution has been developed. The spectrometer is based on acousto-optic tuneable filter technology with fast random wavelength access. Measurements for characterisation of the imaging quality, the spatial resolution, and the spectral resolution are presented. The applicability for 2D-space and phase resolved optical emission spectroscopy (2D-PROES) is shown. 2D-PROES has been applied to an inductively coupled plasma with radio frequency excitation at 13.56 MHz.

AB - A novel acousto-optic spectrometer (IfU Diagnostic Systems GmbH) for 2-dimensional (2D) optical emission spectroscopy with high spectral resolution has been developed. The spectrometer is based on acousto-optic tuneable filter technology with fast random wavelength access. Measurements for characterisation of the imaging quality, the spatial resolution, and the spectral resolution are presented. The applicability for 2D-space and phase resolved optical emission spectroscopy (2D-PROES) is shown. 2D-PROES has been applied to an inductively coupled plasma with radio frequency excitation at 13.56 MHz.

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U2 - 10.1016/j.surfcoat.2005.02.138

DO - 10.1016/j.surfcoat.2005.02.138

M3 - Article

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VL - 200 (1-4)

SP - 859

EP - 861

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 1-4 SPEC. ISS.

ER -

Phase and space resolved optical emission spectroscopic investigations of an inductively coupled RF plasma using an imaging acousto-optic spectrometer

Abstract

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