Abstract
In this paper, a novel nanolens with super resolution, based on the photon nanojet effect through dielectric nanostructures in visible wavelengths, is proposed. The nanolens is made from plastic SU-8, consisting of parallel semi-cylinders in an array. This paper focuses on the lens designed by numerical simulation with the finite-difference time domain method and nanofabrication of the lens by grayscale electron beam lithography combined with a casting/bonding/lift-off transfer process. Monte Carlo simulation for injected charge distribution and development modeling was applied to define the resultant 3D profile in PMMA as the template for the lens shape. After the casting/bonding/lift-off process, the fabricated nanolens in SU-8 has the desired lens shape, very close to that of PMMA, indicating that the pattern transfer process developed in this work can be reliably applied not only for the fabrication of the lens but also for other 3D nanopatterns in general. The light distribution through the lens near its surface was initially characterized by a scanning near-field optical microscope, showing a well defined focusing image of designed grating lines. Such focusing function supports the great prospects of developing a novel nanolithography based on the photon nanojet effect.
Original language | English |
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Article number | 165302 |
Journal | Nanotechnology |
Volume | 27 |
Issue number | 16 |
DOIs | |
Publication status | Published - 04 Mar 2016 |
Keywords
- FDTD simulation
- grayscale electron beam lithography
- nanofabrication
- nanolens
- photo nanojet
- super resolution focusing
ASJC Scopus subject areas
- Bioengineering
- General Chemistry
- Electrical and Electronic Engineering
- Mechanical Engineering
- Mechanics of Materials
- General Materials Science