Plasma Etch Phase Transition Detection Using Optical Emission Spectroscopy

Beibei Ma, Seán McLoone, John Ringwood, N. MacGearailt, M. McGrath, A. Kilally

Research output: Contribution to conferencePoster

Original languageEnglish
Pages40
Publication statusPublished - 2006
EventIntel Ireland Research Conference - Leixlip, Ireland
Duration: 04 Sep 200605 Sep 2006

Conference

ConferenceIntel Ireland Research Conference
CountryIreland
CityLeixlip
Period04/09/200605/09/2006

Cite this

Ma, B., McLoone, S., Ringwood, J., MacGearailt, N., McGrath, M., & Kilally, A. (2006). Plasma Etch Phase Transition Detection Using Optical Emission Spectroscopy. 40. Poster session presented at Intel Ireland Research Conference, Leixlip, Ireland.