Plasma Etch Phase Transition Detection Using Optical Emission Spectroscopy

Beibei Ma, Seán McLoone, John Ringwood, N. MacGearailt, M. McGrath, A. Kilally

Research output: Contribution to conference › Poster

Original language	English
Pages	40
Publication status	Published - 2006
Event	Intel Ireland Research Conference - Leixlip, Ireland Duration: 04 Sep 2006 → 05 Sep 2006

Conference	Intel Ireland Research Conference
Country/Territory	Ireland
City	Leixlip
Period	04/09/2006 → 05/09/2006

Cite this

@conference{87531fa66ed6414a97c3a1ad56d545a7,

title = "Plasma Etch Phase Transition Detection Using Optical Emission Spectroscopy",

author = "Beibei Ma and Se{\'a}n McLoone and John Ringwood and N. MacGearailt and M. McGrath and A. Kilally",

year = "2006",

language = "English",

pages = "40",

note = "Intel Ireland Research Conference ; Conference date: 04-09-2006 Through 05-09-2006",

}