Plasma Etch Variation Detection by Principal Component Analysis of OES Data

Beibei Ma, Seán McLoone, John Ringwood, N. MacGearailt

Research output: Contribution to conferencePoster

Original languageEnglish
Pages44
Publication statusPublished - 2007
Event4th Intel Ireland Research Conference and Raman Workshop - Leixlip, Ireland
Duration: 10 Sep 200712 Sep 2007

Conference

Conference4th Intel Ireland Research Conference and Raman Workshop
CountryIreland
CityLeixlip
Period10/09/200712/09/2007

Cite this

Ma, B., McLoone, S., Ringwood, J., & MacGearailt, N. (2007). Plasma Etch Variation Detection by Principal Component Analysis of OES Data. 44. Poster session presented at 4th Intel Ireland Research Conference and Raman Workshop, Leixlip, Ireland.