Plasma Etch Variation Detection by Principal Component Analysis of OES Data

Beibei Ma, Seán McLoone, John Ringwood, N. MacGearailt

Research output: Contribution to conference › Poster

Original language	English
Pages	44
Publication status	Published - 2007
Event	4th Intel Ireland Research Conference and Raman Workshop - Leixlip, Ireland Duration: 10 Sept 2007 → 12 Sept 2007

Conference	4th Intel Ireland Research Conference and Raman Workshop
Country/Territory	Ireland
City	Leixlip
Period	10/09/2007 → 12/09/2007

Cite this

@conference{51fac2436e9547e4afe8e3800c7b605a,

title = "Plasma Etch Variation Detection by Principal Component Analysis of OES Data",

author = "Beibei Ma and Se{\'a}n McLoone and John Ringwood and N. MacGearailt",

year = "2007",

language = "English",

pages = "44",

note = "4th Intel Ireland Research Conference and Raman Workshop ; Conference date: 10-09-2007 Through 12-09-2007",

}