Plasma Ionization in Low-Pressure Radio-Frequency Discharges. Part I: Optical Measurements

Deborah O'Connell, Timo Gans, A. Meige, P. Awakowicz, R.W. Boswell

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

The electron dynamics in the low-pressure operation regime ($«$ 5 Pa) of a neon capacitively coupled plasma is investigated using phase-resolved optical emission spectroscopy. Plasma ionization and sustainment mechanisms are governed by the expanding and contracting sheath and complex wave–particle interactions. Electrons are energized through the advancing and retreating electric field of the RF sheath. The associated interaction of energetic sheath electrons with thermal bulk plasma electrons drives a two-stream instability also dissipating power in the plasma.
Original languageEnglish
Pages (from-to)1382-1383
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume36 (4)
Issue number4 PART 1
DOIs
Publication statusPublished - Aug 2008

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Condensed Matter Physics

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