Plasma Ionization in Low-Pressure Radio-Frequency Discharges—Part II: Particle-in-Cell Simulation

A. Meige, Deborah O'Connell, Timo Gans, R.W. Boswell

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Plasma ionization in the low-pressure operation regime ( $«$ 5 Pa) of RF capacitively coupled plasmas (CCPs) is governed by a complex interplay of various mechanisms, such as field reversal, sheath expansion, and wave–particle interactions. In a previous paper, it was shown that experimental observations in a hydrogen CCP operated at 13.56 MHz are qualitatively well described in a 1-D symmetrical particle-in-cell (PIC) simulation. In this paper, a spherical asymmetrical PIC simulation that is closer to the conditions of the highly asymmetrical experimental device is used to simulate a low-pressure neon CCP operated at 2 MHz. The results show a similar behavior, with pronounced ionization through field reversal, sheath expansion, and wave–particle interactions, and can be exploited for more accurate quantitative comparisons with experimental observations.
Original languageEnglish
Pages (from-to)1384-1385
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume36 (4)
Issue number4 PART 1
DOIs
Publication statusPublished - Aug 2008

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Condensed Matter Physics

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