Abstract
Phase resolved optical emission spectroscopy, with high temporal resolution, shows that wave-particle interactions play a fundamental role in sustaining capacitively coupled rf plasmas. The measurements are in excellent agreement with a simple particle-in-cell simulation. Excitation and ionization mechanisms are dominated by beam-like electrons, energized through the advancing and retreating electric fields of the rf sheath. The associated large-amplitude electron waves, driven by a form of two-stream instability, result in power dissipation through electron trapping and phase mixing. (c) 2007 American Institute of Physics.
Original language | English |
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Article number | 034505 |
Pages (from-to) | 034505-034505-4 |
Number of pages | 34502 |
Journal | Physics of Plasmas |
Volume | 14 (3) |
Issue number | 3 |
DOIs | |
Publication status | Published - Mar 2007 |
ASJC Scopus subject areas
- General Physics and Astronomy
- Condensed Matter Physics