Plasma ionization through wave-particle interaction in a capacitively coupled radio-frequency discharge

Deborah O'Connell, Timo Gans, D. Vender, U. Czarnetzki, R. Boswell

Research output: Contribution to journalArticlepeer-review

46 Citations (Scopus)

Abstract

Phase resolved optical emission spectroscopy, with high temporal resolution, shows that wave-particle interactions play a fundamental role in sustaining capacitively coupled rf plasmas. The measurements are in excellent agreement with a simple particle-in-cell simulation. Excitation and ionization mechanisms are dominated by beam-like electrons, energized through the advancing and retreating electric fields of the rf sheath. The associated large-amplitude electron waves, driven by a form of two-stream instability, result in power dissipation through electron trapping and phase mixing. (c) 2007 American Institute of Physics.
Original languageEnglish
Article number034505
Pages (from-to)034505-034505-4
Number of pages34502
JournalPhysics of Plasmas
Volume14 (3)
Issue number3
DOIs
Publication statusPublished - Mar 2007

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Condensed Matter Physics

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