Plasma parameter characterization of a reflex plasma source operating in oxygen

E.I. Toader, Bill Graham

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

A reflex discharge plasma, obtained as a hybrid between a Penning discharge plasma (PDP) and a hollow-cathode discharge (HCD) plasma, is analysed as a possible direction-current, high-density plasma source. The experiment is run in oxygen at pressures of 10 mTorr and 1 mTorr, and for discharge currents of 100 to 200 mA. Although the gas pressure is considerably lower than those used in HCDs, the hollow-cathode effect (HCE) occurs for current levels higher than 100 mA and leads to plasma densities comparable with those obtained using inductive plasma sources. The presence of a constant magnetic field leads to the enhancement of electron emission from cathodes under ion bombardment, and to the decreasing of the ion loss by diffusion to the wall.
Original languageEnglish
Pages (from-to)288-294
Number of pages7
JournalPlasma Sources Science & Technology
Volume9
Issue number3
Publication statusPublished - Aug 2000

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Condensed Matter Physics

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