Porous Silicon as a sacrificial layer in Production of Silicon Diaphragms by Precision Grinding

A. Prochaska, Neil Mitchell, Harold Gamble

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationMaterials & Process Integration for MEMS
EditorsFrancis E.H. Tay
PublisherSpringer
Pages27-50
Number of pages24
Publication statusPublished - Aug 2002
EventInternational MEMS Workshop - Singapore, Singapore
Duration: 01 Jul 200201 Jul 2002

Conference

ConferenceInternational MEMS Workshop
CountrySingapore
CitySingapore
Period01/07/200201/07/2002

Bibliographical note

Chapter Number: 2

Cite this