Practical superjunction MOSFET device performance under given process thermal cycles

  • Hanmei Zhong
  • , Yung C. Liang
  • , Ganesh S. Samudra
  • , Xin Yang

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)987-996
Number of pages10
JournalSemiconductor Science and Technology
Volume19
Publication statusPublished - Aug 2004

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