Production of silicon diaphragms by precision grinding

A. Prochaska, Paul Baine, Neil Mitchell, Harold Gamble

Research output: Contribution to conference › Paper

Original language	English
Pages	244-255
Number of pages	12
Publication status	Published - Sep 2000
Event	Conference on Micromachining and Microfabrication Process Technology VI - Santa Clara, Ca, United States Duration: 01 Sep 2000 → 01 Sep 2000

Conference	Conference on Micromachining and Microfabrication Process Technology VI
Country	United States
City	Santa Clara, Ca
Period	01/09/2000 → 01/09/2000

Cite this

Prochaska, A., Baine, P., Mitchell, N., & Gamble, H. (2000). Production of silicon diaphragms by precision grinding. 244-255. Paper presented at Conference on Micromachining and Microfabrication Process Technology VI, Santa Clara, Ca, United States.

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title = "Production of silicon diaphragms by precision grinding",

author = "A. Prochaska and Paul Baine and Neil Mitchell and Harold Gamble",

year = "2000",

month = sep,

language = "English",

pages = "244--255",

note = "Conference on Micromachining and Microfabrication Process Technology VI ; Conference date: 01-09-2000 Through 01-09-2000",

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TY - CONF

T1 - Production of silicon diaphragms by precision grinding

AU - Prochaska, A.

AU - Baine, Paul

AU - Mitchell, Neil

AU - Gamble, Harold

PY - 2000/9

Y1 - 2000/9

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M3 - Paper

SP - 244

EP - 255

T2 - Conference on Micromachining and Microfabrication Process Technology VI

Y2 - 1 September 2000 through 1 September 2000

ER -