Original language | English |
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Pages | 244-255 |
Number of pages | 12 |
Publication status | Published - Sep 2000 |
Event | Conference on Micromachining and Microfabrication Process Technology VI - Santa Clara, Ca, United States Duration: 01 Sep 2000 → 01 Sep 2000 |
Conference
Conference | Conference on Micromachining and Microfabrication Process Technology VI |
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Country/Territory | United States |
City | Santa Clara, Ca |
Period | 01/09/2000 → 01/09/2000 |