Production of silicon diaphragms by precision grinding

A. Prochaska, Paul Baine, Neil Mitchell, Harold Gamble

Research output: Contribution to conferencePaper

8 Citations (Scopus)
Original languageEnglish
Pages244-255
Number of pages12
Publication statusPublished - Sep 2000
EventConference on Micromachining and Microfabrication Process Technology VI - Santa Clara, Ca, United States
Duration: 01 Sep 200001 Sep 2000

Conference

ConferenceConference on Micromachining and Microfabrication Process Technology VI
CountryUnited States
CitySanta Clara, Ca
Period01/09/200001/09/2000

Cite this

Prochaska, A., Baine, P., Mitchell, N., & Gamble, H. (2000). Production of silicon diaphragms by precision grinding. 244-255. Paper presented at Conference on Micromachining and Microfabrication Process Technology VI, Santa Clara, Ca, United States.