Prospects of phase resolved optical emission spectroscopy as a powerful diagnostic tool for RF-discharges

Timo Gans, V. Schulz-von Der Gathen, H.F. Döbele

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

Phase resolved optical emission spectroscopy (PROES) bears considerable potential for diagnostics of RF discharges that give detailed insight of spatial and temporal variations of excitation processes. Based on phase and space resolved measurements of the population dynamics of excited states several diagnostic techniques have been developed. Results for a hydrogen capacitively coupled RF (CCRF) discharge are discussed as an example. The gas temperature, the degree of dissociation and the temporally and spatially resolved electron energy distribution function (EEDF) of energetic electrons (>12eV) are measured. Furthermore, the pulsed electron impact excitation during the field reversal phase, typical for hydrogen CCRF discharges, is exploited for measurements of atomic and molecular data like lifetimes of excited states, coefficients for radiationless collisional de-excitation (quenching coefficients), and cascading processes from higher electronic states.
Original languageEnglish
Pages (from-to)523-528
Number of pages6
JournalContributions to Plasma Physics
Volume44 (5-6)
Issue number5-6
DOIs
Publication statusPublished - 2004

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Condensed Matter Physics

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