Rapid thermal processing of polysilicon emitter bipolar transistors in a combined CMOS/bipolar process

L.A. Grant, David McNeill, P.F. Blomley

Research output: Contribution to conference › Paper

Original language	English
Pages	207-209
Number of pages	3
Publication status	Published - Sep 1987
Event	Proceedings of 17th European Solid State Device Research Conference, ESSDERC '87 - Bologna, Italy Duration: 01 Sep 1987 → 01 Sep 1987

Conference	Proceedings of 17th European Solid State Device Research Conference, ESSDERC '87
Country	Italy
City	Bologna
Period	01/09/1987 → 01/09/1987

Cite this

@conference{965d902e115849ddb24a809f225e9457,

title = "Rapid thermal processing of polysilicon emitter bipolar transistors in a combined CMOS/bipolar process",

author = "L.A. Grant and David McNeill and P.F. Blomley",

year = "1987",

month = sep,

language = "English",

pages = "207--209",

note = "Proceedings of 17th European Solid State Device Research Conference, ESSDERC '87 ; Conference date: 01-09-1987 Through 01-09-1987",

}