Optical emission spectra from a low-pressure Ar plasma were studied with high spatial resolution. It has been shown that the intensity ratios of Ar lines excited through metastable levels to those excited directly from the ground state are sensitive to the shape of electron energy distribution function. From these measurements, important information on the spatial variation of plasma parameters can be obtained. (C) 1999 American Institute of Physics. [S0003-6951(99)01629-0].
|Number of pages||3|
|Journal||Applied Physics Letters|
|Publication status||Published - 19 Jul 1999|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)