Role of low-energy electrons in Ar emission from low-pressure radio frequency discharge plasma

S.A. Moshkalyov; Philip Steen; S. Gomez; Bill Graham

Role of low-energy electrons in Ar emission from low-pressure radio frequency discharge plasma

S.A. Moshkalyov, Philip Steen, S. Gomez, Bill Graham

Research output: Contribution to journal › Article › peer-review

Abstract

Optical emission spectra from a low-pressure Ar plasma were studied with high spatial resolution. It has been shown that the intensity ratios of Ar lines excited through metastable levels to those excited directly from the ground state are sensitive to the shape of electron energy distribution function. From these measurements, important information on the spatial variation of plasma parameters can be obtained. (C) 1999 American Institute of Physics. [S0003-6951(99)01629-0].

Original language	English
Pages (from-to)	328-330
Number of pages	3
Journal	Applied Physics Letters
Volume	75
Issue number	3
Publication status	Published - 19 Jul 1999

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Fingerprint Dive into the research topics of 'Role of low-energy electrons in Ar emission from low-pressure radio frequency discharge plasma'. Together they form a unique fingerprint.

Cite this

@article{21d021fcbaef4fa7b4d8d59db83f5044,

title = "Role of low-energy electrons in Ar emission from low-pressure radio frequency discharge plasma",

abstract = "Optical emission spectra from a low-pressure Ar plasma were studied with high spatial resolution. It has been shown that the intensity ratios of Ar lines excited through metastable levels to those excited directly from the ground state are sensitive to the shape of electron energy distribution function. From these measurements, important information on the spatial variation of plasma parameters can be obtained. (C) 1999 American Institute of Physics. [S0003-6951(99)01629-0].",

author = "S.A. Moshkalyov and Philip Steen and S. Gomez and Bill Graham",

year = "1999",

month = jul,

day = "19",

language = "English",

volume = "75",

pages = "328--330",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "3",

}

TY - JOUR

T1 - Role of low-energy electrons in Ar emission from low-pressure radio frequency discharge plasma

AU - Moshkalyov, S.A.

AU - Steen, Philip

AU - Gomez, S.

AU - Graham, Bill

PY - 1999/7/19

Y1 - 1999/7/19

N2 - Optical emission spectra from a low-pressure Ar plasma were studied with high spatial resolution. It has been shown that the intensity ratios of Ar lines excited through metastable levels to those excited directly from the ground state are sensitive to the shape of electron energy distribution function. From these measurements, important information on the spatial variation of plasma parameters can be obtained. (C) 1999 American Institute of Physics. [S0003-6951(99)01629-0].

AB - Optical emission spectra from a low-pressure Ar plasma were studied with high spatial resolution. It has been shown that the intensity ratios of Ar lines excited through metastable levels to those excited directly from the ground state are sensitive to the shape of electron energy distribution function. From these measurements, important information on the spatial variation of plasma parameters can be obtained. (C) 1999 American Institute of Physics. [S0003-6951(99)01629-0].

M3 - Article

VL - 75

SP - 328

EP - 330

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 3

ER -