Role of low-energy electrons in Ar emission from low-pressure radio frequency discharge plasma

S.A. Moshkalyov, Philip Steen, S. Gomez, Bill Graham

Research output: Contribution to journalArticlepeer-review

34 Citations (Scopus)

Abstract

Optical emission spectra from a low-pressure Ar plasma were studied with high spatial resolution. It has been shown that the intensity ratios of Ar lines excited through metastable levels to those excited directly from the ground state are sensitive to the shape of electron energy distribution function. From these measurements, important information on the spatial variation of plasma parameters can be obtained. (C) 1999 American Institute of Physics. [S0003-6951(99)01629-0].
Original languageEnglish
Pages (from-to)328-330
Number of pages3
JournalApplied Physics Letters
Volume75
Issue number3
Publication statusPublished - 19 Jul 1999

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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