Rotation of a nanoparticle cloud in an inductively coupled plasma induced by weak static magnetic fields

M. Schulze, Deborah O'Connell, Timo Gans, P. Awakowicz, A. Von Keudell

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Hydrocarbon nanoparticles with diameters between 10 and 30 nanometres are created in a low pressure plasma combining capacitive and inductive power coupling. The particles are generated in the capacitive phase of the experiment and stay confined in the plasma in the inductive phase. The presence of these embedded particles induces a rotation of a particle-free region (void) around the symmetry axis of the reactor. The phenomenon is analysed using optical emission spectroscopy both line integrated and spatially resolved via an intensified charge coupled device camera. From these data, electron temperatures and densities are deduced. We find that the rotation of the void is driven by a tangential component of the ion drag force induced by an external static magnetic field. Two modes are observed: a fast rotation of the void in the direction opposite to that of the tangential component and a slow rotation in the same direction. The rotation speed decreases linearly with the size of the particles. In the fast mode the dependence on the applied magnetic field is weak and consequently the rotation speed can serve as a monitor to detect particle sizes in low temperature plasmas.
Original languageEnglish
Pages (from-to)774-784
Number of pages11
JournalPlasma Sources Science and Technology
Volume16 (4)
Issue number4
DOIs
Publication statusPublished - Nov 2007

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Condensed Matter Physics

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