Selective deposition of CVD iron on silicon dioxide and tungsten

Research output: Contribution to journalArticle

9 Citations (Scopus)
Original languageEnglish
Pages (from-to)2229-2233
Number of pages5
JournalMicroelectronic Engineering
Volume83(11-12)
Issue number11-12
DOIs
Publication statusPublished - Nov 2006

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics

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