Original language | English |
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Pages (from-to) | 2229-2233 |
Number of pages | 5 |
Journal | Microelectronic Engineering |
Volume | 83(11-12) |
Publication status | Published - Nov 2006 |
Selective depostion of CVD iron on silicon dioxide and tungsten
Mervyn Armstrong, Paul Baine, Daniel Bien, Harold Gamble, John Montgomery, Yee Low
Research output: Contribution to journal › Article › peer-review