Selective depostion of CVD iron on silicon dioxide and tungsten

Mervyn Armstrong, Paul Baine, Daniel Bien, Harold Gamble, John Montgomery, Yee Low

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)2229-2233
Number of pages5
JournalMicroelectronic Engineering
Volume83(11-12)
Publication statusPublished - Nov 2006

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