Selective depostion of CVD iron on silicon dioxide and tungsten

Mervyn Armstrong, Paul Baine, Daniel Bien, Harold Gamble, John Montgomery, Yee Low

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	2229-2233
Number of pages	5
Journal	Microelectronic Engineering
Volume	83(11-12)
Publication status	Published - Nov 2006

Cite this

@article{312b4d783f8c4e68aeac727a453bbf22,

title = "Selective depostion of CVD iron on silicon dioxide and tungsten",

author = "Mervyn Armstrong and Paul Baine and Daniel Bien and Harold Gamble and John Montgomery and Yee Low",

year = "2006",

month = nov,

language = "English",

volume = "83(11-12)",

pages = "2229--2233",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}