Selective depostion of CVD iron on SiO2 and tungsten

Mervyn Armstrong, Michael Bain, Daniel Bien, John Montgomery, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Pages0-0
Number of pages1
Publication statusPublished - Mar 2006
EventMaterials for Advanced Metallization (MAM 2006) - Grenoble, France
Duration: 01 Mar 200601 Mar 2006

Conference

ConferenceMaterials for Advanced Metallization (MAM 2006)
CountryFrance
CityGrenoble
Period01/03/200601/03/2006

Cite this

Armstrong, M., Bain, M., Bien, D., Montgomery, J., & Gamble, H. (2006). Selective depostion of CVD iron on SiO2 and tungsten. 0-0. Paper presented at Materials for Advanced Metallization (MAM 2006), Grenoble, France.