Selective depostion of CVD iron on SiO2 and tungsten

Mervyn Armstrong, Michael Bain, Daniel Bien, John Montgomery, Harold Gamble

Research output: Contribution to conference › Paper

Original language	English
Pages	0-0
Number of pages	1
Publication status	Published - Mar 2006
Event	Materials for Advanced Metallization (MAM 2006) - Grenoble, France Duration: 01 Mar 2006 → 01 Mar 2006

Conference	Materials for Advanced Metallization (MAM 2006)
Country/Territory	France
City	Grenoble
Period	01/03/2006 → 01/03/2006

Cite this

@conference{1956d17300264949ba567798b5804afd,

title = "Selective depostion of CVD iron on SiO2 and tungsten",

author = "Mervyn Armstrong and Michael Bain and Daniel Bien and John Montgomery and Harold Gamble",

year = "2006",

month = mar,

language = "English",

pages = "0--0",

note = "Materials for Advanced Metallization (MAM 2006) ; Conference date: 01-03-2006 Through 01-03-2006",

}