Sheath dynamics observed in a 13.56 MHz-driven plasma

C.M.O. Mahony, R. AlWazzan, Bill Graham

Research output: Contribution to journalArticle

54 Citations (Scopus)

Abstract

We have established, through time correlated plasma emission and electrode and plasma potential measurements, that the near electrode emission observed in asymmetric capacitively coupled 13.56 MHz-driven hydrogen plasmas is caused by field reversal that leads to sheath collapse. Near-electrode emission has now been observed in Ar and He. The field reversal appears to be due to collision-induced electron drag. (C) 1997 American Institute of Physics.
Original languageEnglish
Pages (from-to)608-610
Number of pages3
JournalApplied Physics Letters
Volume71
Publication statusPublished - 1997

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