Abstract
We have established, through time correlated plasma emission and electrode and plasma potential measurements, that the near electrode emission observed in asymmetric capacitively coupled 13.56 MHz-driven hydrogen plasmas is caused by field reversal that leads to sheath collapse. Near-electrode emission has now been observed in Ar and He. The field reversal appears to be due to collision-induced electron drag. (C) 1997 American Institute of Physics.
| Original language | English |
|---|---|
| Pages (from-to) | 608-610 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 71 |
| Publication status | Published - 1997 |