Sheath dynamics observed in a 13.56 MHz-driven plasma

C.M.O. Mahony, R. AlWazzan, Bill Graham

Research output: Contribution to journalArticlepeer-review

57 Citations (Scopus)


We have established, through time correlated plasma emission and electrode and plasma potential measurements, that the near electrode emission observed in asymmetric capacitively coupled 13.56 MHz-driven hydrogen plasmas is caused by field reversal that leads to sheath collapse. Near-electrode emission has now been observed in Ar and He. The field reversal appears to be due to collision-induced electron drag. (C) 1997 American Institute of Physics.
Original languageEnglish
Pages (from-to)608-610
Number of pages3
JournalApplied Physics Letters
Publication statusPublished - 1997


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