Silicon carbide layers produced by rapid thermal CVD

Fred Ruddell, David McNeill, Mervyn Armstrong, Harold Gamble

Research output: Contribution to conference › Paper

Original languageEnglish
Pages159-170
Number of pages12
Publication statusPublished - Oct 1990
EventProceedings of SPIE - Aachen, Germany
Duration: 01 Oct 1990 → 01 Oct 1990

Conference

ConferenceProceedings of SPIE
Country/TerritoryGermany
CityAachen
Period01/10/1990 → 01/10/1990

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