Silicon carbide layers produced by rapid thermal CVD

Fred Ruddell, David McNeill, Mervyn Armstrong, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Pages159-170
Number of pages12
Publication statusPublished - Oct 1990
EventProceedings of SPIE - Aachen, Germany
Duration: 01 Oct 199001 Oct 1990

Conference

ConferenceProceedings of SPIE
CountryGermany
CityAachen
Period01/10/199001/10/1990

Cite this

Ruddell, F., McNeill, D., Armstrong, M., & Gamble, H. (1990). Silicon carbide layers produced by rapid thermal CVD. 159-170. Paper presented at Proceedings of SPIE, Aachen, Germany.