Silicon-on-insulator substrates with buried tungsten silicide layer

Harold Gamble, Mervyn Armstrong, Paul Baine, Michael Bain, David McNeill

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)
Original languageEnglish
Pages (from-to)551-557
Number of pages7
JournalSolid State Electronics
Issue number4
Publication statusPublished - Apr 2001

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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