Silicon-on-insulator substrates with buried tungsten silicide layer

Harold Gamble, Mervyn Armstrong, Paul Baine, Michael Bain, David McNeill

Research output: Contribution to journalArticle

20 Citations (Scopus)
Original languageEnglish
Pages (from-to)551-557
Number of pages7
JournalSolid State Electronics
Volume45(4)
Issue number4
DOIs
Publication statusPublished - Apr 2001

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