Silicon-on-insulator substrates with buried tungsten silicide layer

Harold Gamble, Mervyn Armstrong, Paul Baine, Michael Bain, David McNeill

Research output: Contribution to conferencePaper

20 Citations (Scopus)
Original languageEnglish
Publication statusPublished - Oct 2001
EventEuropean Meeting on Silicon-on-Insulator Devices (EUROSOI-2000) - Granada, Spain
Duration: 01 Oct 200101 Oct 2001

Conference

ConferenceEuropean Meeting on Silicon-on-Insulator Devices (EUROSOI-2000)
CountrySpain
CityGranada
Period01/10/200101/10/2001

Cite this

Gamble, H., Armstrong, M., Baine, P., Bain, M., & McNeill, D. (2001). Silicon-on-insulator substrates with buried tungsten silicide layer. Paper presented at European Meeting on Silicon-on-Insulator Devices (EUROSOI-2000), Granada, Spain.