Silicon-on-insulator substrates with buried tungsten silicide layer

Harold Gamble, Mervyn Armstrong, Paul Baine, Michael Bain, David McNeill

Research output: Contribution to conference › Paper

Original language	English
Publication status	Published - Oct 2001
Event	European Meeting on Silicon-on-Insulator Devices (EUROSOI-2000) - Granada, Spain Duration: 01 Oct 2001 → 01 Oct 2001

Conference	European Meeting on Silicon-on-Insulator Devices (EUROSOI-2000)
Country/Territory	Spain
City	Granada
Period	01/10/2001 → 01/10/2001

Cite this

@conference{53be6b17531c44d98070b8c6858a91ee,

title = "Silicon-on-insulator substrates with buried tungsten silicide layer",

author = "Harold Gamble and Mervyn Armstrong and Paul Baine and Michael Bain and David McNeill",

year = "2001",

month = oct,

language = "English",

note = "European Meeting on Silicon-on-Insulator Devices (EUROSOI-2000) ; Conference date: 01-10-2001 Through 01-10-2001",

}

TY - CONF

T1 - Silicon-on-insulator substrates with buried tungsten silicide layer

AU - Gamble, Harold

AU - Armstrong, Mervyn

AU - Baine, Paul

AU - Bain, Michael

AU - McNeill, David

PY - 2001/10

Y1 - 2001/10

UR - http://www.scopus.com/inward/record.url?scp=0035335811&partnerID=8YFLogxK

M3 - Paper

T2 - European Meeting on Silicon-on-Insulator Devices (EUROSOI-2000)

Y2 - 1 October 2001 through 1 October 2001

ER -