Spatial structures of plasma parameters in a magnetic neutral loop discharge

Deborah O'Connell, D.L. Crintea, Timo Gans, U. Czarnetzki

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)

Abstract

Spatial structures of plasma parameters in a radio-frequency inductively coupled magnetic neutral loop discharge are investigated under various parameter variations using spatially resolved Langmuir probe measurements. A strong coupling between the plasma production region, in the neutral loop (NL) plane, and the axially remote substrate region is observed. The two regions are connected through the separatrices and therefore, spatial profiles in the substrate region are strongly influenced by the plasma production region and the structure of the separatrices. The electron temperature in the plasma production region peaks in the centre of the NL while the maximum in electron density is shifted radially inwards due to diffusion. Details of the structures in both regions, the production region and the substrate region, are determined through the position of the NL and the gradient of the inhomogeneous magnetic field around the NL confinement region. Parameter combinations are found providing higher plasma densities and better uniformity than in common inductively coupled plasmas without applying an additional magnetic field. The uniformity can be further improved using temporal variations of the magnetic field structure.
Original languageEnglish
Article number013
Pages (from-to)543-548
Number of pages6
JournalPlasma Sources Science and Technology
Volume16 (3)
Issue number3
DOIs
Publication statusPublished - 01 Aug 2007

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Condensed Matter Physics

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