Sputtering of copper atoms by keV atomic and molecular ions: A comparison of experiment with analytical and computer based models

Research output: Contribution to journalArticle

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)409-416
Number of pages8
JournalNuclear Instruments & Methods In Physics Research Section B- Beam Interactions With Materials And Atoms
Volume194
Issue number4
Publication statusPublished - 2002

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

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