Strategies for gallium removal after focused ion beam patterning of ferroelectric oxide nanostructures

Alina Schilling; Robert Bowman; J.F. Scott; Marty Gregg

doi:10.1088/0957-4484/18/3/035301

Strategies for gallium removal after focused ion beam patterning of ferroelectric oxide nanostructures

Alina Schilling, Robert Bowman, J.F. Scott, Marty Gregg

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	035301
Pages (from-to)	035301-5
Number of pages	5
Journal	Nanotechnology
Volume	18
Issue number	3
DOIs	https://doi.org/10.1088/0957-4484/18/3/035301
Publication status	Published - 24 Jan 2007

ASJC Scopus subject areas

Engineering (miscellaneous)
General Materials Science
Physics and Astronomy (miscellaneous)

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10.1088/0957-4484/18/3/035301

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title = "Strategies for gallium removal after focused ion beam patterning of ferroelectric oxide nanostructures",

author = "Alina Schilling and Robert Bowman and J.F. Scott and Marty Gregg",

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Strategies for gallium removal after focused ion beam patterning of ferroelectric oxide nanostructures

ASJC Scopus subject areas

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