STUDY OF THE DISCHARGE OF A MULTICUSP ION-SOURCE OPERATING WITH H2 AND D2

A.A. Mullan, Bill Graham

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)

Abstract

The plasma parameters and relative positive and negative ion concentrations in a small, filtered, multicusp ion source, operating at low plasma density (
Original languageEnglish
Pages (from-to)1533-1540
Number of pages8
JournalJournal Of Physics D-applied Physics
Volume24
Publication statusPublished - 1991

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