Abstract
The plasma parameters and relative positive and negative ion concentrations in a small, filtered, multicusp ion source, operating at low plasma density (
| Original language | English |
|---|---|
| Pages (from-to) | 1533-1540 |
| Number of pages | 8 |
| Journal | Journal Of Physics D-applied Physics |
| Volume | 24 |
| Publication status | Published - 1991 |