The application of limited reaction processing to the deposition of silicon carbide layers

Fred Ruddell, David McNeill, Mervyn Armstrong, Harold Gamble

Research output: Contribution to conference › Paper

Original language	English
Pages	357-360
Number of pages	4
Publication status	Published - Sept 1990
Event	Proceedings of 20th European Solid State Device Research Conference, ESSDERC '90 - Nottingham, United Kingdom Duration: 01 Sept 1990 → 01 Sept 1990

Conference	Proceedings of 20th European Solid State Device Research Conference, ESSDERC '90
Country/Territory	United Kingdom
City	Nottingham
Period	01/09/1990 → 01/09/1990

Cite this

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title = "The application of limited reaction processing to the deposition of silicon carbide layers",

author = "Fred Ruddell and David McNeill and Mervyn Armstrong and Harold Gamble",

year = "1990",

month = sep,

language = "English",

pages = "357--360",

note = "Proceedings of 20th European Solid State Device Research Conference, ESSDERC '90 ; Conference date: 01-09-1990 Through 01-09-1990",

}

TY - CONF

T1 - The application of limited reaction processing to the deposition of silicon carbide layers

AU - Ruddell, Fred

AU - McNeill, David

AU - Armstrong, Mervyn

AU - Gamble, Harold

PY - 1990/9

Y1 - 1990/9

M3 - Paper

SP - 357

EP - 360

T2 - Proceedings of 20th European Solid State Device Research Conference, ESSDERC '90

Y2 - 1 September 1990 through 1 September 1990

ER -