The application of limited reaction processing to the deposition of silicon carbide layers

Fred Ruddell, David McNeill, Mervyn Armstrong, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Pages357-360
Number of pages4
Publication statusPublished - Sep 1990
EventProceedings of 20th European Solid State Device Research Conference, ESSDERC '90 - Nottingham, United Kingdom
Duration: 01 Sep 199001 Sep 1990

Conference

ConferenceProceedings of 20th European Solid State Device Research Conference, ESSDERC '90
Country/TerritoryUnited Kingdom
CityNottingham
Period01/09/199001/09/1990

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