The challenge of revealing and tailoring the dynamics of radio-frequency plasmas

Timo Gans Gans, Deborah O'Connell, V. Schulz-von Der Gathen, J. Waskoenig

Research output: Contribution to journalArticlepeer-review

55 Citations (Scopus)

Abstract

The complex dynamics of ionization and excitation mechanisms in capacitively coupled radio-frequency plasmas is discussed for single- and dual-frequency operations in low-pressure and atmospheric pressure plasmas. Electrons are energized through the dynamics of electric fields in the vicinity of the plasma boundary sheaths. Distinctly different power dissipation mechanisms can either co-exist or initiate mode transitions exhibiting characteristic spatio-temporal ionization structures. Phase resolved optical emission spectroscopy, in combination with adequate modelling of the population dynamics of excited states, and numerical simulations reveal dissipation associated with sheath expansion, sheath collapse, transient electron avalanches and wave–particle interactions. In dual-frequency systems the relative phase between the two frequency components provides additional strategies to tailor the plasma dynamics.
Original languageEnglish
Article number034010
Pages (from-to)034010-034010-6
Number of pages34005
JournalPlasma Sources Science and Technology
Volume19 (3)
Issue number3
DOIs
Publication statusPublished - May 2010

ASJC Scopus subject areas

  • Condensed Matter Physics

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