The deposition and characterisation of CVD tungsten silicide for applications in microelectronics

Mervyn Armstrong, Michael Bain, Harold Gamble

Research output: Contribution to journalArticle

11 Citations (Scopus)
Original languageEnglish
Pages (from-to)227-232
Number of pages6
JournalVacuum
Volume64(3-4)
Issue number3-4
Publication statusPublished - Jan 2002

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

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