The Development of Silicon for Integrated Circuit Technology

Research output: Chapter in Book/Report/Conference proceedingConference contribution

64 Citations (Scopus)
Original languageEnglish
Title of host publicationVLSI Technology and Design
Place of PublicationLondon/Orlando
PublisherAcademic Press
Pages1-29
Number of pages29
ISBN (Print)0-12-481840-4
Publication statusPublished - 1987

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