The effect of germane variation on microstructure in polycrystalline Si/SiGe thin films grown by rapid thermal chemical vapour deposition: fractal characterisation using scanning probe microscopy

P.A. Campbell, D.G. Walmsley, R.L.F. Chong, D.L. Gay, Harold Gamble, David McNeill

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)S1067-S1071
Number of pages5
JournalApplied Physics A - Materials Science & Processing
Publication statusPublished - Mar 1998

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