| Original language | English |
|---|---|
| Pages (from-to) | 426-430 |
| Number of pages | 5 |
| Journal | Nuclear Instruments and Methods in Physics Research Sect. B |
| Volume | 181 |
| Issue number | 1-4 |
| Publication status | Published - Jul 2001 |
ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Instrumentation
- Surfaces and Interfaces