The influence of the relative phase between the driving voltages on electron heating in asymmetric dual frequency capacitive discharges

D. Ziegler, J. Trieschmann, T. Mussenbrock, R.P. Brinkmann, J. Schulze, U. Czarnetzki, E. Semmler, P. Awakowicz, Deborah O'Connell, Timo Gans Gans

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Physics & Astronomy