The Laser MicroJet® (LMJ) - A multi-solution technology for high quality micro-machining

Tuan Anh Mai*, Bernold Richerzhagen, Paul C. Snowdon, David Wood, Paul G. Maropoulos

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)


The field of laser micromachining is highly diverse. There are many different types of lasers available in the market. Due to their differences in irradiating wavelength, output power and pulse characteristic they can be selected for different applications depending on material and feature size [1], The main issues by using these lasers are heat damages, contamination and low ablation rates, This report examines on the application of the Laser MicroJet® (LMJ), a unique combination of a laser beam with a hair-thin water jet as a universal tool for micro-machining of MEMS substrates, as well as ferrous and non-ferrous materials. The materials include gallium arsenide (GaAs) & silicon wafers, steel, tantalum and alumina ceramic. A Nd:YAG laser operating at 1064 nm (infra red) and frequency doubled 532 nm (green) were employed for the micro-machining of these materials.

Original languageEnglish
Title of host publicationLaser-based Micro- and Nanopackaging and Assembly
Publication statusPublished - 20 Mar 2007
Externally publishedYes
EventLaser-based Micro- and Nanopackaging and Assembly - San Jose, CA, United States
Duration: 22 Jan 200724 Jan 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceLaser-based Micro- and Nanopackaging and Assembly
Country/TerritoryUnited States
CitySan Jose, CA


  • Laser microjet®
  • MEMS
  • Micro-machining
  • Water guided laser

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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