Three-dimensional macroporous silicon photonic crystal with large photonic band gap

Joerg Schilling, J. White, A. Scherer, G. Stupian, R. Hillebrand, U. Gosele

Research output: Contribution to journalArticle

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Abstract

Three-dimensional photonic crystals based on macroporous silicon are fabricated by photoelectrochemical etching and subsequent focused-ion-beam drilling. Reflection measurements show a high reflection in the range of the stopgap and indicate the spectral position of the complete photonic band gap. The onset of diffraction which might influence the measurement is discussed.
Original languageEnglish
Article number011101
Pages (from-to)011101-1-011101-3
Number of pages3
JournalApplied Physics Letters
Volume86(1)
Issue number1
DOIs
Publication statusPublished - Jan 2005

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photonics
silicon
drilling
crystals
ion beams
etching
diffraction

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Schilling, J., White, J., Scherer, A., Stupian, G., Hillebrand, R., & Gosele, U. (2005). Three-dimensional macroporous silicon photonic crystal with large photonic band gap. Applied Physics Letters, 86(1)(1), 011101-1-011101-3. [011101]. https://doi.org/10.1063/1.1842855
Schilling, Joerg ; White, J. ; Scherer, A. ; Stupian, G. ; Hillebrand, R. ; Gosele, U. / Three-dimensional macroporous silicon photonic crystal with large photonic band gap. In: Applied Physics Letters. 2005 ; Vol. 86(1), No. 1. pp. 011101-1-011101-3.
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Schilling, J, White, J, Scherer, A, Stupian, G, Hillebrand, R & Gosele, U 2005, 'Three-dimensional macroporous silicon photonic crystal with large photonic band gap', Applied Physics Letters, vol. 86(1), no. 1, 011101, pp. 011101-1-011101-3. https://doi.org/10.1063/1.1842855

Three-dimensional macroporous silicon photonic crystal with large photonic band gap. / Schilling, Joerg; White, J.; Scherer, A.; Stupian, G.; Hillebrand, R.; Gosele, U.

In: Applied Physics Letters, Vol. 86(1), No. 1, 011101, 01.2005, p. 011101-1-011101-3.

Research output: Contribution to journalArticle

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Schilling J, White J, Scherer A, Stupian G, Hillebrand R, Gosele U. Three-dimensional macroporous silicon photonic crystal with large photonic band gap. Applied Physics Letters. 2005 Jan;86(1)(1):011101-1-011101-3. 011101. https://doi.org/10.1063/1.1842855